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No. 47 (1994/03) >

Title :X線二結晶法によるストライプ状SiO_2/GaAs基板の格子歪の測定
Title alternative :Measurement of Lattice Strain of Striped Si0_2/GaAs Substrate by X-ray Double Crystal Method
Authors :前濱, 剛廣
新里, 樹
安冨祖, 忠信
Authors alternative :Maehama, Takehiro
Shinzato, Itsuki
Afuso, Chusin
Issue Date :Mar-1994
Abstract :A measurement method for relative lattice strain of striped Si0_2/GaAs and the results of the measurements are presented. As the fundamental of the method the peak - splitting angle of the rocking curve of X - ray double crystal method due to the relative lattice strain is used. The method is applied to some samples with different stripe widths. The results of the measurements reveal the following facts. The relative lattice strain varies inversely as the stripe width. The equation of the relationship is given by assuming the exponential distribution of the lattice strain. The relative lattice strain is divided into two terms by elastic theory. One is the spacing strain of the parallel atomic planes and the other is the tilting strain of the planes.
Type Local :紀要論文
ISSN :0389-102X
Publisher :琉球大学工学部
URI :http://hdl.handle.net/20.500.12000/12408
Citation :琉球大学工学部紀要 no.47 p.77 -87
Appears in Collections:No. 47 (1994/03)

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