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No. 44 (1992/09) >

Title :RFマグネトロンスパッタリング法によるYBaCuO超伝導薄膜の作製
Title alternative :Preparation of YBaCuO Thin Films by RF Magnetron Sputtering
Authors :渡久地, 実
比嘉, 晃
島袋, 敏行
Authors alternative :Toguchi, Minoru
Higa, Akira
Shimabukuro, Toshiyuki
Issue Date :Sep-1992
Abstract :High T_e superconducting YBaCuO thin film have been prepared on MgO (100) substrate by RF magnetron sputtering using single target under sputtering gas pressures ranging from 5 mTorr to 1Torr. Critical temperature T_<con> of the films on the substrates positioned right above target center decreased with increasing sputtering gas pressure, while that of the films on substrates positioned right above erosion area decreased at pressure below 50mTorr. The composition ratios Ba/Y and Cu/Y of films were increased with increasing sputtering gas pressure. This tendency was remarkable at position right above erosion area.
Type Local :紀要論文
ISSN :0389-102X
Publisher :琉球大学工学部
URI :http://hdl.handle.net/20.500.12000/14448
Citation :琉球大学工学部紀要 no.44 p.137 -144
Appears in Collections:No. 44 (1992/09)

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