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No. 36 (1988/09) >

Title :水素ガス反応性RFマグネトロンスパッタリング法によるダイヤモンド状炭素薄膜の作製と評価
Title alternative :Synthesis of Diamond Like Carbon Film by Hydrogen Gas Reactive RF Magnetron Sputtering, and its Properties
Authors :渡久地, 實
新垣, 修
山下, 崇
Authors alternative :Toguchi, Minoru
Arakaki, Osamu
Yamashita, Takashi
Issue Date :Sep-1988
Abstract :Diamond like carbon (DLC) films prepared by hydrogen gas reactive rf magnetron sputter deposition from a graphite target onto low temperature substrate (room temperature~160°C) have been examined using techniques of electric resistivity measurement and transmission electron microscopy. Electric resistivities of these films were the order of 10^10~10^13$\Omega$・cm, which increased with increasing hydrogen gas pressure. Electron diffraction patterns of these films indicated predominantly amorphous structure. Although 8 rings pattern in the electron diffraction observed by the selected area, the observed interplanar spacings coincided with the data by ASTM card for diamond (6-0675), and the number of these area increased with decreasing the gas pressure. Oblique-texture electron diffraction patterns were observed in the films which were prepared at the higher gas pressure (0.6~1.0Torr).
Type Local :紀要論文
ISSN :0389-102X
Publisher :琉球大学工学部
URI :http://hdl.handle.net/20.500.12000/5547
Citation :琉球大学工学部紀要 no.36 p.63 -75
Appears in Collections:No. 36 (1988/09)

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