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a-C:H薄膜のプラズマ処理による構造変化勢理客, 勝則; 山下, 秀和; 比嘉, 晃; 渡久地, 實; Serikyaku, Katsunori; Yamashita, Hidekazu; Higa, Akira; Toguchi, MinoruSep-1999

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